Parylene C Viscoelastic Properties

Prof YK Lee, Dr Song, Maxime Duvieusart

Prof YK Lee, Dr Song, Maxime Duvieusart

Viscoelastic properties of Parylene C

Viscoelastic properties of Parylene C

Contents

Introduction 2

Abstract 2

Manufacturing process 2

Properties 3

Applications 5

Viscoelasticity 5

Objectives of the project 6

Progress in design and experiment 6

Data collection 6

Data analysis 7

Analysis of existing project problems 10

Future plan with deliverable schedule 12

References 12

Introduction

Abstract

Parylene is the name given to a wide range of polyxylylene polymers. The three main types are categorised as: Parylene N, Parylene C and Parylene D. This paper focuses on the properties of Parylene C as it is the most commonly used type. This is due to its price point, moisture and dielectric properties as well as its processing advantages. Parylene C is polymer whose base consists of polyp-xylene moners which are shown below in figure 1.

Figure 1 - Parylene C polyp-xylene monomer

Manufacturing process

A three step process is necessary to apply Parylene C coating to a surface. The Parylene must first be vaporized to convert the dimer into a gas. The dimer gas then enters the pryolizer and is transformed into the polypxylene monomer. The gas then enters its final stage and the monomers bound together to form the parylene polymer. After the transformation is complete, the gas slowly deposits evenly on the desired surface. The process is summarized in the figure below.

Figure 2 - Parylene C coating process

For our research silicon wafers were coated with 1µm of Parylene C as shown in the diagram below.

1 m Parylene-C

Silicon wafer

1 m Parylene-C

Silicon wafer

Figure 3 - Parylene C coated silicon wafer

Properties

Parylene C is the most commonly used parylene and this is due to its advantageous properties. As with other polymers, Parylene C has microcrystals dispersed through its amorphous phase. These...